Injectors / LFMs
Liquid Flow Meter and Injector Valve Service
Liquid-source semiconductor processes including CVD, ALD, and a growing range of advanced deposition techniques depend on precise dosing of liquid precursors into a vaporizer or process chamber.
Even small drift in a Liquid Flow Meter (LFM) or wear in an injection valve can produce film thickness variation, particle generation, or yield loss that is difficult to trace back to its source. Laminar Technologies supplies and repairs Liquid Flow Meters and Injector Valves, restoring the dosing accuracy your process recipes demand.
Disciplined Calibration Process
Every LFM and Injector that we service moves through the same disciplined process: incoming inspection, cleaning, functional diagnosis, component repair or replacement as required, calibration against NIST-traceable standards, and final quality assurance testing before the unit is packaged for return.